Calibration Specimens & Standards

Calibration And Test Specimens For SEM

Magnification Reference Standard

The Magnification refece Standard can be used for optical (in transmitted and reflected illumination modes) and Scanning Electron Microscopy. The useful range of magnification for calibration purposes in both the horizontal and vertical axes is from 10X to 50,000X. The design allows for the direct measure of barreling and pincushion distortion at any magnification.

Patterns to help determine your SEM's recording CRT and camera lens focus are also included.

The geometric design of the MRS-2 utilizes groups of concentric squares spanning several orders of magnitude with line widths and spaces of 250µm and 25µm and a fine pitch of 2µm. The largest of the three nested boxes are 8mm, 1mm, and 40µm. The overall size of the standard is approx. 9 x 9 x 2.3mm. Appropriate graphics are included on the standard for identification purposes.

The MRS-2 can be directly viewed in the SEM without the need for a conductive coating. The antireflective chromium pattern is coated on an optically transparent (yet electrically conductive) thin film over fused silica. To protect the standard and facilitate mounting in your instrument, a special retainer is available.

Cat # Description Price
H30000 MRS-2 Magnification Reference Standard $689.00
H30005 Retainer for MRS-2 $165.00

Low Magnification Calibration Specimen

Precision copper screening, 400 mesh, is affixed to a specimen mount to aid in calibrating specimens at magnifications from 50x to 500x. On the same specimen mount, 1000 mesh nickel screening is positioned beside the 400 mesh screening. Aids in calibrating specimens at magnifications from 500x to 1000x. Both screenings are exceptionally uniform in all dimensions. Measurement chart and instructions included.

Please specify the type of specimen mount required.
Cat # Description Price
H30025 Low Magnification Calibration Specimen $67.00

Composite Magnification Test Specimen

Composed of three magnification specimens attached firmly to a scanning microscope specimen mount. One specimen is 400 mesh copper screening for low magnification work. The middle specimen is a 15,240 line per inch grating for the high magnification range. The third specimen is a 1,500 mesh nickel screening for the middle magnification range. 50 mesh screening is placed over the entire grating for strength. This composite specimen is both a time and a space saver. Measurement chart and instructions included. Please specify the type of specimen mount required.

Cat # Description Price
H30050 Composite Magnification Test Specimen $185.00

Grating - 15,240 lines per inch

Made specifically for use in scanning electron microscopes. This replica is taken from a ruled diffraction grating with 15,240 lines per inch. Very useful for magnification determination in the range of 1000x to 15,000x. A 50 mesh screen is placed over entire grating for strength. Measurement chart and instructions included.

Please specify the type of specimen mount required.
Cat # Description Price
H30075 Grating - 15,240 lines per inch $100.00

Grating - 28,800

Replica taken from a ruled diffraction grating. Useful for magnification of 3000x to 30,000x. A 50 mesh screen is placed over entire grating for strength. Measurement chart and instructions included.

Please specify the type of specimen mount required.
Cat # Description Price
H30100 Grating - 28,800 $100.00

Grating - "Waffle"

Replica specifically made for SEM use is taken from a ruled diffraction grating with two sets of lines ruled at right angles to each other. There are 60,960 lines per inch in both directions. A 50 mesh screen is place over entire grating for strength. Useful for magnification determination, detection and measurement of lens distortion, and the determination of the degree of fore-shortening in an image, as a function of specimen tilt. Measurement chart and instructions included.Please specify the type of specimen mount required.

Cat # Description Price
H30125 Grating - "Waffle" $106.00

SEM Performance Standard

A test and performance sample for the SEM. Vapor deposited aluminum on a silicon substrate. Photolithographed and etched. Ten separate measurements and tests may be performed with this one standard. Dimensions are printed near each target area. May be used for:

  • Magnification calibration
  • Magnification center and scan rotation center
  • Geometry errors and pin cushion distortion
  • Depth of field measurements
  • Dynamic focus performance and tilt correction
  • Orthogonality and linearity tests
  • Stage motion tests
  • Video performance and video loop stability
Cat # Description Price
H30150 SEM Performance Standard $1,644.00
H30151 Tracability of Sem Standard POR

Image Quality Checker

A specimen of 200 mesh gold screening is firmly affixed to an SEM specimen mount. This provides a quick method of determining image quality. Good surface detail discernible at reasonably high magnification. Will not oxidize.

Please specify the type of specimen mount required.
Cat # Description Price
H30175 Image Quality Checker $64.00

Platinum/Iridium Coated Holey Carbon Film

Metal particles provide for resolution checks while holes correct astigmatism and make focusing easier. Mounted on a 3.0mm diameter grid.

Cat # Description Price
H30200 Platinum/Iridium Coated Holey Carbon Film $57.00

SEM Test Standard

Produced by electron beam lithography on a silicon single crystal wafer. The standard is composed of three orders of magnitude of checkerboard patterns which allow highly precise measurements. Each standard is one square centimeter placed on the specimen mount of your choice. This is comprised of a 10 x 10µm show crisp contrast. The periodic structures have an accuracy of approximately 0.2µm and an angular precision of approximately 5 arc seconds. A specimen may be placed directly on the wafer for accurate measurements.

  • Useful for:
  • Magnification determination
  • Image distortion
  • Image resolution
  • Selected area diffraction

Normal and electron beam contamination are easily cleaned from water surface.

Cat # Description Price
H30225 SEM Test Standard $2,478.00

All prices are in Canadian Dollars. To request a price quotation or for other inquiries, please contact us.

back top next